Our partner Hitachi High-Tech

Compact scanning electron microscope FlexSEM 1000

from Hitachi High-Tech

The  compact SEM FlexSEM 1000 offers complete SEM analysis under variable pressure conditions with a small footprint. The instrument is equipped with a pre-centered tungsten filament, easy to maintain and to change within minutes. It can be operated at acceleration voltages between 0.3 – 20 kV and thus reveals ultra-sensitive surface analysis of any material incl. vacuum sensitive samples. Chemical information of almost the complete period system of elements is accessible via EDX. Imaging is either done with a high-sensitive 4-quadrant BSE detector, under high- or low-vacuum conditions, or with an Everhart Thornley SE detector. Both image modes can be combined. In Secondary Electron (SE) mode the FlexSEM 1000 reaches a resolution of 4 nm at 20 kV (15 nm at 1 kV), in backscattering electron (BSE) mode 5 nm at 20 kV and magnifications up to 800.000x (display). A 3-axis sample stage offers Z-height, tilt and rotation (360°) in addition to X and Y movements. The clear user interface was designed for ease-to-use operation. The software offers a huge variation of automated adjustable parameters such as brightness, contrast, alignment, focus, reports, stage position, and so on. The OS Windows 10 guarantees an easy access to the (network)environment.

Features
  • 4-quadrant-backscattered electron detector (BSE) and Everhart Thornley secondary electron detector (SE-) including BSE + SE Mixing
  • Variable pressure mode for analysis of non-conductive samples (6 to 100 Pa)
  • Pre-centered tungsten filament, acceleration voltages between 300 V – 20 kV, magnification up to 800.000x
  • Motorized Stage: X: 0 – 40 mm, Y: 0 – 50 mm, Z: 5 – 15 mm, rotation: 360°, tilt: -15° bis 90°
  • EDX by Bruker (Quantax75), Oxford (Aztec series) and EDAX (Elements)
  • Options SEM Map, UVD (variable pressure SE detector), chamberscope, Track ball,…
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Further information

Friendly GUI

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The small footprint of the FlexSEM 1000 gives you any flexibility in relation to the working environment: 45 cm (width), 64 cm (depth) and 67 cm (height) offers even the possibility of a desktop installation. For detailed installation requirements contact us. 

Options for FlexSEM

  • SEM Map: Correlation of light and electron imaging
  • EDX by Bruker, Oxford or EDAX
  • Navigation camera or chamberscope
  • Scanning rotation
  • Dynamic focus/tilt compensation
  • Auto focus, alignment, beam saturation, stigmation, brightness, contrast,…
  • Image Stitching
  • Variable pressure SE detector
  • SEM data manager
  • Control panel
  • Communication interface
  • Track ball

Further options:

  • Anti-vibration table
  • Specifications and further options refer to contact mentioned below

Applications

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Downloads

FlexSEM 1000 II

Contact

Dr. Simon John
Dr. Simon John
Dr. Dominic Vogt
Dr. Dominic Vogt

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Contact

Quantum Design GmbH

Breitwieserweg 9
64319 Pfungstadt
Germany

Phone:+49 6157 80710-0
Fax:+49 6157 807109
E-mail:germanyqd-europe.com
Dr. Simon JohnProduct Manager - Electron microscopy
+49 6157 80710-841
Write e-mail

Dr. Dominic VogtProduct Manager - Electron microscopy
+49 6157 80710-557
Write e-mail